| 000 | 00561nam a2200205Ia 4500 | ||
|---|---|---|---|
| 005 | 20250805130414.0 | ||
| 008 | 250805s2016||||xx |||||||||||||| ||und|| | ||
| 020 | _a9781498711753 | ||
| 082 | _a620.112 YAM | ||
| 100 | _aYamada Isao | ||
| 245 | 0 | _aMaterials Processing By Cluster Ion Beams History, Technology and Applications | |
| 260 |
_bCRC Press _aNew York _c2016 |
||
| 300 | _a244 | ||
| 650 | _a beams | ||
| 650 | _a cluster | ||
| 650 | _a yamada isao | ||
| 650 | _amaterials | ||
| 690 | _aElectronics and Communications Engineering | ||
| 942 | _cBK | ||
| 999 |
_c85639 _d85639 |
||