000 00549nam a2200229Ia 4500
005 20250805130155.0
008 250805s2010||||xx |||||||||||||| ||und||
020 _a9780815520375
082 _a671.735 MAT
100 _aMattox Donald M
245 0 _aPhysical Vapor Deposition (PVD) Processing
250 _a2nd
260 _bElsevier Pub.
_aUSA
_c2010
300 _a746
650 _aDeposition (PVD)
650 _aMattox Donald M
650 _aPhysical
650 _aProcessing
650 _aVapor
690 _aEnglish
942 _cBK
999 _c83443
_d83443