000 00433nam a2200157Ia 4500
005 20250807110929.0
008 250807s2014||||xx |||||||||||||| ||und||
020 _a9780070487093
082 _a621.381 HSU
100 _aHsu Tai Ran
245 0 _aMEMS & Microsystems Design and Manufacture
260 _aNew Delhi
_bMc Graw Hill Pub.
_c2014
300 _a436
690 _aElectronics and Communications Engineering
942 _cBB
999 _c100377
_d100377